MICRO/NANO FABRICATION
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25-12-01
1046
102
AOE Etcher ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù.
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10-01-05
6218
101
(Çʵ¶) ½ÅÁ¤¿¬ÈÞ ±â°£ ÈÞ¹«°ü·Ã °øÁö»çÇ×ÀÔ´Ï´Ù¡¦
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09-12-29
6130
100
AOE Etcher ¼ö¸® ÁßÀÔ´Ï´Ù.
fab
09-12-23
5971
99
Oxford ICP ¼ö¸® ¿Ï·á
fab
09-12-16
5966
98
Oxford ICP Àåºñ Á¡°Ë ÁßÀÔ´Ï´Ù.
fab
09-12-02
6541
97
RIE¥± Àåºñ Gate Valve ¼ö¸® ÁßÀÔ´Ï´Ù.
fab
09-10-09
5937
96
E-Beam lithography °øÁ¤¼ºñ½º ½ÃÀÛ
fab
09-08-25
7327
95
Oxford ICP ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù.
fab
09-08-11
5857
94
Oxford ICP Àåºñ ¼ö¸®ÁßÀÔ´Ï´Ù.
fab
09-07-31
6059
93
E-Beam Evaporator ¼ö¸® ¿Ï·á
fab
09-06-25
6194
92
E-Beam Evaporator Á¡°ËÁß
fab
09-06-25
5714
91
°øÁ¶±â Á¡°Ë¿Ï·á
fab
09-06-09
6089
90
°øÁ¶±â Á¡°Ë
fab
09-06-08
6341
89
4¿ù 11ÀÏ(Åä) Fab ÃâÀÔ±ÝÁö
fab
09-04-07
5872
88
°íÁø°ø Multi Sputter ¼³Ä¡ ¿Ï·á
fab
09-03-13
6788
11
12
13
14
15
16
17
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